Brooks-instrument Mfi Series Manual do Utilizador descarregar pdf (Página 73)

5-9

Brooks

Mf Series

Section 5 Parts List

Installation and Operation Manual

X-TMF-Mfi-Mfx-MFC-eng

Part Number: 541B074AAG

August, 2009

Table 5-5 Mf Series Tool and Spare Part Kits

Mfi Service Tool Kit B. Mfi Series Valve Shim Kit

P/N S778D017AAA P/N S810A372BMA

Permits the complete disassembly of the Contains:

Mf Series for servicing 1 - .010" Large Spacer

2 - .005" Large Spacers

Contains: 1 - .010" Small Spacer

2 - .005" Small Spacers

1 - O-ring Removal Tool

1 - Potentiometer Adjustment Tool C. Model Mf50/60 O-ring Service Kit

2 - Allen Wrench P/N S375Z278***

1 - Phillips Screw Driver

2 - Hex Wrench Contains:

1 - Nut Driver for Orifice 1 - Orifice O-ring

1 - Restrictor Removal Tool 1 - Restrictor O-ring

2 - Common Screw Driver 1 - Valve O-ring

2 - Sensor O-rings ( Mfi Series )

A. Mf Series NEMA 4 Gasket Kit 2 - Adaptor O-rings

P/N S375Z383AAA 1 - Syringe with Fomblin Grease

1 - Information Sheet

Contains:

1 - Cover Gasket D. Model Mf51/61 O-ring Service Kit

1 - Electronics Housing Gasket P/N S375Z339***

1 - Valve Nut O-ring

1 - Coil Housing O-ring Contains:

1 - Coil Base O-ring 1 - Orifice O-ring

4 - Cover Screw O-ring 1 - Restrictor O-ring

2 - Calibration Screws with O-ring 1 - Valve O-ring

2 - Sensor O-rings ( Mfi Series )

Model Mf51 Header Removal Tool 2 - Adaptor O-rings

P/N S817Z036AAA 1 - Endblock O-ring

1 - Syringe with Fumblin Grease

Model Mf51 Orifice Removal Tool 1 - Information Sheet

P/N S908Z049AAA

E. Model Mf53/63 O-ring Service Kit

P/N S375Z395***

Contains:

1 - Orifice O-ring

1 - Restrictor O-ring

1 - Valve O-ring

2 - Sensor O-rings ( Mfi Series )

2 - Adaptor O-rings

3 - Endblock O-ring

1 - Filter O-rings

2 - Valve Plate O-ring

1 - Seal O-ring

1 - Syringe with Fomblin Grease

1 - Information Sheet

*** QTA = Viton, SUA = Buna, TTA = Kalrez,

NS = Not Shown, AR = As Required

Note: Refer to Brooks publication

DS-TMF-Mfi-Mfx-MFC-eng for additional accessories.

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