Brooks-instrument Mfi Series Manual do Utilizador descarregar pdf (Página 54)

4-16

Brooks

Mf Series

Section 4 Maintenance &

Troubleshooting

Installation and Operation Manual

X-TMF-Mfi-Mfx-MFC-eng

Part Number: 541B074AAG

August, 2009

Orifice Size (inches) Minimum Flow Rate (sccm)

32°F (0°C) 70°F (21.1°C)

0.0013 5.3 (5.7)

0.002 12.5 (13.5)

0.003 39.2 (42.2)

0.004 82.5 (88.9)

0.0055 190 (205)

0.007 374 (403)

0.010 748 (806)

0.014 1364 (1469)

0.020 2673 (2879)

0.032 6490 (6991)

0.048 12980 (13980)

0.062 22000 (2879)

0.078 31900 (34400)

0.093 42500 (45800)

0.120 69300 (74700)

0.1405 95,500 (103,000)

0.1495 108,200 (116,600)

Inlet Pressure = 10 psig

Outlet Pressure = 10 inches of water (0.4 psig) or less

Note: Flow Rate based on Nitrogen

5. I f the measured flow exceeds the value shown in Table 4-4 proceed to

step 7.

If the flow is less than expected, depressurize the controller and

disassemble the valve following Disassembly, Section 4-4 and proceed to

step 6.

Note: If the orifice size in use is unknown, it can be determined by:

Refering to Section 4-7, Orifice Sizing.Opening the control valve and

inspecting the orifice. Refer to Section 4-4, Disassembly

Consulting the factory with the full model number which is printed on the

front label of the controller and the order.

6.For orifice sizes 0.007" and greater add a 0.005" thick larger diameter

flow clearance spacer.

For orifice sizes less than 0.007" add a larger diameter 0.005" thick large

diameter flow clearance spacer and two 0.002" thick small diameter flow

clearance spacers. Refer to Figure 4-3b for spacer placement.

If this does not provide adequate flow, remove one at a time, 0.002"thick

small diameter spacers until the correct flow is achieved.

Assemble the valve following Assembly Section 4-4, utilizing the old socket

head cap screws and the 020 elastomeric O-ring. Apply inlet pressure and

zero volts to the valve.

Table 4-4 Orifice Capacities

1 2 ... 49 50 51 52 53 54 55 56 57 58 59 ... 81 82

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