Brooks-instrument Mfi Series Manual do Utilizador descarregar pdf (Página 10)

1-2

Brooks

Mf Series

Section 1 Introduction

Installation and Operation Manual

X-TMF-Mfi-Mfx-MFC-eng

Part Number: 541B074AAG

August, 2009

and positions the precision solenoid control valve. When the command

signal is below 1% of full scale, the control valve is positioned to fully

closed. The control valve can be latched fully open or closed by activating

the valve override circuit.

1-4 Specifications

Do not operate this instrument in excess of the specification

listed below. Failure to heed this warning can result in seriou

personal injury and/or damage to the equipment.

WARNING

PERFORMANCE CHARACTERISTICS:

* Standard temperature and pressure equals 0°C and 101kPa (760 Torr).

These mass flow controllers and meters can be calibrated to other

conditions. Specify at time of ordering.

Control/Usable Range

50 to 1

Accuracy

±1% full scale including linearity at calibrated conditions

±1.5% full scale including linearity for Mf50 and Mf60 for flow ranges

greater than 20 slpm

Table 1-1 Flow Ranges

Figure 1-1 Principle of Operation.

+ Vdc

Flow

Amplifier

Heater

0-5 Vdc

and

4-20 mA

Bypass

Sensor Tube

Downstream

Temperature

Sensor

To Power Supply

Upstream

Temperature

Sensor

Bridge

for

T Detection

Mass Flow Mass Flow Flow Ranges PED

Controller Meter Nitrogen* Module H

Model Model Min. F. S. Max. F. S. Max. Press.

(slpm) psi (Bar)

Mf50 Mf60 0.003 30 1500 (100) SEP

N/A Mf61 0.003 30 4500 (300)

Mf51 Mf63 10 100 1000 (68)

Mf53 N/A 100 1000 1000 (68) 1 for all 150 lbs.Flanges

1 2 ... 5 6 7 8 9 10 11 12 13 14 15 ... 81 82

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