Brooks-instrument Mfi Series Manual do Utilizador descarregar pdf (Página 5)

Brooks

Mf Series

Contents

Installation and Operation Manual

X-TMF-Mfi-Mfx-MFC-eng

Part Number: 541B074AAG

August, 2009

Paragraph Page

Number Number

Section 1 Introduction

1-1 Description .................................................................................................................................1-1

1-2 Design Features.........................................................................................................................1-1

1-3 Principle of Operation.................................................................................................................1-1

1-4 Specifications .............................................................................................................................1-2

1-5 Electrical Specifications..............................................................................................................1-4

Section 2 Installation

2-1 General ......................................................................................................................................2-1

2-2 Receipt of Equipment.................................................................................................................2-1

2-3 Recommended Storage Practice ...............................................................................................2-1

2-4 Return Shipment ........................................................................................................................2-2

2-5 Transit Precaution ......................................................................................................................2-2

2-6 Removal from Storage ...............................................................................................................2-2

2-7 Gas Connections........................................................................................................................2-3

2-8 In-Line Filter ...............................................................................................................................2-3

2-9 Installation (Refer to Table 4-1, Figure 1-4 and Quick Start Instructions) ...................................2-3

2-10 Electrical Interfacing (Electrical Specifications Refer to Section 1-5).........................................2-8

2-11 Configuring the PC Board ..........................................................................................................2-9

Section 3 Operation

3-1 Theory of Operation ...................................................................................................................3-1

3-2 Operating Procedure..................................................................................................................3-2

3-3 Zero Adjustment .........................................................................................................................3-3

3-4 Calibration Procedure ................................................................................................................3-4

3-5 Response ...................................................................................................................................3-8

Section 4 Maintenance & Troubleshooting

4-1 General ......................................................................................................................................4-1

4-2 Troubleshooting..........................................................................................................................4-2

4-3 Sensor Tube...............................................................................................................................4-7

4-4 Disassembly and Assembly .......................................................................................................4-7

4-5 Gas Conversion Factors ...........................................................................................................4-18

4-6 Restrictor Sizing ........................................................................................................................4-22

4-7 Orifice Sizing .............................................................................................................................4-25

Section 5 Parts List

5-1 General ......................................................................................................................................5-1

Section A CE Certificate

CE Certificate of Mass Flow Equipment ................................................................................................A-1

Warranty, Local Sales/Service Contact Information....................................................................... Back Cover

Figures

1 2 3 4 5 6 7 8 9 10 ... 81 82

Comentários a estes Manuais

Sem comentários

Brooks-instrument Mfi Series Manual do Utilizador Página 5

Comentários a estes Manuais

Manuais e produtos relacionados com Hardware Brooks-instrument Mfi Series