Brooks-instrument Mfi Series Manual do Utilizador descarregar pdf (Página 15)

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Section 1 Introduction

Brooks

Mf Series

Installation and Operation Manual

X-TMF-Mfi-Mfx-MFC-eng

Part Number: 541B074AAG

August, 2009

Figure 1-5 Model Mf50 Controller Dimensions

Figure 1-6 Model Mf51 Controller Dimensions

Connections "A" Dim.

9/16 -18 UNF 5.28/134

1/4" Tube Compr. 7.30/185

1/8" Tube Compr. 7.13/181

1/4" VCR

7.17/182

1/4" VCO

6.85/174

1/4" NPT 6.89/175

6mm Tube Compr. 7.32/186

Dimensions in inches/mm

Connections "A" Dim.

9/16 -18 UNF 5.85/148.5

1/4" Tube Compr. 7.87/199.9

3/8" Tube Compr. 7.99/203.0

1/4" VCR 7.74/196.5

1/4" VCO 7.42/188.5

Dimensions in inches/mm

1 2 ... 10 11 12 13 14 15 16 17 18 19 20 ... 81 82

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