Brooks-instrument Mfi Series Manual do Utilizador descarregar pdf (Página 39)

4-1

Brooks

Mf Series

Section 4 Maintenance &

Troubleshooting

Installation and Operation Manual

X-TMF-Mfi-Mfx-MFC-eng

Part Number: 541B074AAG

August, 2009

4-1 General

It becomes necessary to remove the instrument from the system

after exposure to toxic, pyrophoric, flammable or corrosive gas,

purge the controller thoroughly with a dry inert gas such as

nitrogen before disconnecting the gas connections. Failure to

correctly purge the controller could result in fire, explosion or

death. Corrosion or contamination of the mass flow controller

upon exposure to air may also occur.

WARNING

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Brooks-instrument Mfi Series Manual do Utilizador Página 39