Brooks-instrument Mfi Series Manual do Utilizador descarregar pdf (Página 60)

4-22

Brooks

Mf Series

Section 4 Maintenance &

Troubleshooting

Installation and Operation Manual

X-TMF-Mfi-Mfx-MFC-eng

Part Number: 541B074AAG

August, 2009

4-6 Restrictor Sizing

The restrictor assembly is a ranging device for the sensor portion of of the

controller/meter. It creates a pressure drop which is linear with flow rate.

This diverts a sample quantity of the process gas flow through the

sensor.Each restrictor maintains the rate of sensor flow to the restrictor

flow, however, the total flow through each restrictor is different. Different

restrictors (micron porosity and active area) have different pressure drops

and produce instruments with different full scale flow rates. For a

discussion of the interaction of the various parts of the instruments, you are

urged to review Section 3-1, Theory of Operation.

If the restrictor assembly has been contaminated with foreign matter, the

pressure drop vs. flow characteristics will be altered and it must be cleaned

or replaced. It may also be necessary to replace the restrictor assembly

when the mass flow instrument is to be calibrated to a new flow rate.

Table 4-6 Model Mf50/60 Series Standard Restrictors

Range

sccm Air Equivalent Flow Part Number

Size Low High ACLFE Wire Mesh

D 8.022 11.36 S110Z275BMT

E 11.23 15.90 S110Z276BMT

F 15.72 22.26 S110Z277BMT

G 22.01 31.17 S110Z278BMT

H 30.82 43.64 S110Z279BMT

J 43.14 61.09 S110Z280BMT

K 60.40 85.53 S110Z281BMT

L 84.56 119.7 S110Z282BMT

M 118.4 167.6 S110Z283BMT

N 165.7 234.7 S110Z284BMT

P 232.0 328.6 S110Z285BMT

Q 324.8 460.0 S110Z286BMT

R 454.8 644.0 S110Z287BMT

S 636.7 901.6 S110Z288BMT

T 891.4 1262 S110Z289BMT

U 1248 1767 S110Z290BMT

V 1747 2474 S110Z291BMT

W 2446 3464 S110Z292BMT

X 3424 4849 S110Z319BMA

Y 4794 6789 S110Z321BMA

1 6711 9504 S110Z317BMA

2 9396 13310 S110Z228BMA

3 13150 18630 S110Z226BMA

4 18420 30000 S110Z224BMA

Materials: BMT = 316 stainless steel (ACLFE only)

BMA = Sintered 316 stainless steel (wire mesh only)

Note: For full scale flow rates less than 8 sccm, use the low flow plug P/N 618K019BMT in place of a restrictor assembly and

install a low flow filler ring P/N 724Z363BMT in the valve cavity after the orifice is installed.

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