Brooks-instrument SLAMf Series Manual do Utilizador descarregar pdf (Página 9)

1-3

Section 1 - Introduction

Installation and Operation Manual

X-TMF-SLAMf-MFC-eng

Part Number: 541B032AAG

April, 2013 Brooks

Digital MFC's and MFM's

Sensitivity to Mounting Attitude:

<0.2% FS maximum deviation from specified accuracy, after rezeroing.

RATINGS:

Temperature Sensitivity

Zero: less than 0.05% FS per °C

Span: less than 0.1% of rate per °C

Pressure Sensitivity

± 0.03% per psig up to 200 psig (13.79 bar) (N

Eq.).

Maximum Operating Pressure

(4)

See Table 1-1

Pressure Equipment Directive (PED) 97/23/EC

(4)

See Table 1-1.

Pressure Differential Range (Controllers)

Minimum

Model SLAMf50

5 psi (0.35 bar) up to 30 lpm N

eq.

Model SLAMf51

10 psi (0.69 bar) from 30 lpm to 100 lpm N

eq.

Model SLAMf53

7.5 psi (0.52 bar) at 500 lpm N

eq.

14.5 psi (1.00 bar) at 1000 lpm N

eq.

35.0 psi (2.41 bar) at 2500 lpm N

eq.

(consult factory for details)

High DP valve 30 to 290 psi (20 bar maximum)

Low DP valve 7.5 to 30 psid (2 bar max.)

Minimum pressure drop depends on gas and FS flow rate (consult factory)

Leak Integrity

(4)

Inboard to Outboard: 1x10

-9

atm scc/sec Helium max.

Ambient Temperature Limits

Operating: 0°C to 65°C (32°F to 149°F)

Non-Operating: -25°C to 100°C (-13°F to 212°F)

Fluid Temperature Limits

0°C to 65°C (32°F to 149°F)

Table 1-1 Flow Ranges and Pressure Settings

Mass Flow

Controlle

Mass Flow

Mete

Pressure Ratings

P.E.D. Module H Category

Model: Model: Min. FS Max. FS

Unit

(2)

Bar/psi

SLAMF50 (1)

SLAMF60

(1)

0.003 30 lpm 100bar/1500psi SEP

SLAMF51 SLAMF61 20 100 lpm 100bar/1500psi(3) SEP

SLAMF53 SLAMF63 100 2500 lpm 70bar/1000psi 1 for all 150lbs flanges

2 for all other connections

Flow Ranges N2 Equivalent

(1) 300 bar (4500 psi) version optional

(2) Refering to normal or standard conditions (on customer request)

(3) 70 bar / 1000 psi for UL Certification

(4)

Helium leak and pressure test of elastomer sealed devices is performed with integral 9/16" - 18 UNF or 1-1/16" - 12 UNF

1 2 3 4 5 6 7 8 9 10 11 12 13 14 ... 75 76

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