Brooks-instrument SLAMf Series Manual do Utilizador descarregar pdf (Página 12)

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Section 1 - Introduction

Installation and Operation Manual

X-TMF-SLAMf-MFC-eng

Part Number: 541B032AAG

April, 2013Brooks

Digital MFC's and MFM's

Figure 1-1 Open Collector Alarm Output

Figure 1-2 General Wiring

Valve Override Signal Specifications (Analog I/O Versions only)

Input Impedence: 800 kΩ

Absolute Max. Input: -25 Vdc > VOR

> 25 Vdc

(without damage)

5 Volt Reference Signal (Analog I/O versions only)

A 5 Vdc reference output is provided to the customer for use in generating

a setpoint and/or Valve Override signal. The current drive of this output is

very limited and must be used with care.

Min. Load Resistance: 2 kΩ (2.5 mA maximum)

Accuracy: +1.0%

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Brooks-instrument SLAMf Series Manual do Utilizador Página 12