Brooks-instrument SLAMf Series Manual do Utilizador descarregar pdf (Página 11)

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Section 1 - Introduction

Installation and Operation Manual

X-TMF-SLAMf-MFC-eng

Part Number: 541B032AAG

April, 2013 Brooks

Digital MFC's and MFM's

Command/Setpoint Input (Analog I/O capabilities)

Voltage and Current type inputs (but not both simultaneously) are

supported.

Setpoint input types are software selectable as follows:

0 - 5 Vdc

1 - 5 Vdc

0 - 20 mA

4 - 20 mA

Voltage Setpoint Input Specifications

Nominal Range: 0 - 5 Vdc

Full Range: 0 - 5.5 Vdc

Absolute Max.: 20 V

(Without Damage)

Input Impedence: >990 kΩ

Current Setpoint Input Specifications

Nominal Range: 4 - 20 mA or 0 - 20 mA

Full Range: 0 - 22 mA

Absolute Max.: 25 mA

(Without Damage)

Input Impedence: 125 Ω

Flow Output (Analog I/O version only)

Voltage and current type outputs (but not both simultaneously) are

supported. Flow output types are selectable as follows.

0 - 5 Vdc

1 - 5 Vdc

0 - 20 mA

4 - 20 mA

Flow Output (Voltage) Specifications

Nominal Range: 0 - 5 Vdc, 1 - 5 Vdc

Full Range: -0.5 - 5.5 Vdc (@ 0-5 Vdc); 0.6 - 5.5 Vdc (@ 1-5 Vdc)

Min. Load Resistance:2 kΩ

Flow Output (Current) Specifications

Nominal Range: 4 - 20 mA or 0 - 20 mA

Full Range: 0-22 mA (@ 0-20 mA); 3.8-22 mA (@ 4-20 mA)

Max. Load: 380 Ω (for supply voltage < 16 Vdc)

580 Ω (for supply voltage

> 16 Vdc)

Valve Override Signal (Analog I/O version only)

The Valve Override Signal (VOR) is implemented as an analog input which

measures the voltage at the input and controls the valve based upon the

measured reading as follows:

Floating / Unconnected: Instrument controls valve to command setpoint

VOR < 0.3 Vdc: Valve Closed

VOR > 4.8 Vdc: Valve Open

0.3 Vdc > VOR > 4.8 Vdc: Undefined

1 2 ... 6 7 8 9 10 11 12 13 14 15 16 ... 75 76

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