Brooks-instrument CMC Series Manual do Utilizador descarregar pdf (Página 11)

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3.0 OPERATION

For most accurate pressure measurement, allow the CMC Series to warm up for

at least 15 minutes. After installation, periodically check the zero output reading

to verify correct output. Adjust the zero potentiometer, if incorrect (See Calibra-

tion and Adjustment Section for Zero adjustment instructions).

Table 1 indicates the lowest pressures available for reading and pressure control

for each range of the CMC Series. The lowest suggested pressure available for

reading is limited by the resolution and the accuracy of the CMC Series. This is

directly related to the electrical noise on the signal output and can be signifi-

cantly effected by incorrect electrical ground connection, or connection to an

electronically noisy power supply or readout instrument. Improved results may

be obtained if the transducer is operated in an environment with stable tempera-

ture and air flow. The lowest recommended pressure used for control applica-

tions, such as a closed loop downstream pressure control system is based on a

signal output of 50 mV.

Table 1: Recommended Lowest Pressures Available for Reading &

Pressure Control

Full scale Range

Recommended Lowest

Pressure Reading

Recommended Lowest

Pressure for Control

10 Torr 0.005 Torr 0.05 Torr

20 Torr 0.010 Torr 0.10 Torr

100 Torr 0.050 Torr 0.50 Torr

1000 Torr 0.500 Torr 5.00 Torr

10 mbar 0.005 mbar 0.05 mbar

100 mbar 0.05 mbar 0.5 mbar

1000 mbar 0.5 mbar 5 mbar

1.333 kPa 0.0006 kPa 0.0066 kPa

13.333 kPa 0.0066 kPa 0.0666 kPa

133.32 kPa 0.0666 kPa 0.6666 kPa

Table 2: Applications

Application Matrix

Full Scale Pressure Range

(Torr)

10 20 100 200 1000

Pressure Measurement

RRRRR

Upstream Pressure Control

RRRRR

Back Side Wafer Cooling

AARRR

Downstream pressure Control

RRRRR

R = Recommended

A = Acceptable

3.0

_OPERATION

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